Chip Package Interaction(CPI) risk assessment on 28nm Back End of Line(BEOL) stack of a large I/O chip using compact 3D FEA modeling

Chip Package Interaction (CPI) is a widely recognized quality and reliability challenge for flip-chip packages due to the ultra low-K materials used within the silicon Back End of Line (BEOL). This paper discusses a predictive finite element model developed to address this challenge. Furthermore, for advanced flip-chip package models, it is challenging to have the entire C4 bump array within the model due to the extremely large pin count (I/O) fitted at a fine pitch within a large die. As an example, for CPU chips, it is not uncommon to have chip contain over 10,000 C4 bumps. Accounting for such large bump count with FEA models, makes the analyses not just computationally expensive but also often impossible. The proposed study will try to address these challenges by demonstrating a “compact” 3D modeling approach for 28nm chip stack. The effective properties developed for C4 joints will also be adjusted to account for Cu pillar joints. Lastly, the model has been validated with full bump array models that do not use effective properties to confirm the usefulness and scalability of this approach.

[1]  John H. L. Pang,et al.  Flip chip on board solder joint reliability analysis using 2-D and 3-D FEA models , 2001 .

[2]  Chirag Shah,et al.  Chip-package interaction: Challenges and solutions to mechanical stability of Back end of Line at 28nm node and beyond for advanced flip chip application , 2012, 2012 IEEE 14th Electronics Packaging Technology Conference (EPTC).

[3]  Chirag Shah,et al.  CPI challenges to BEOL at 28nm node and beyond , 2012, 2012 IEEE International Reliability Physics Symposium (IRPS).

[4]  V. Kripesh,et al.  Optimization of the Thermomechanical Reliability of a 65 nm Cu/Low-$k$ Large-Die Flip Chip Package , 2009, IEEE Transactions on Components and Packaging Technologies.

[5]  Aditya Karmarkar,et al.  Modeling of interconnect stress evolution during BEOL process and packaging , 2013, 2013 IEEE International Interconnect Technology Conference - IITC.

[6]  Xu Chen,et al.  Prediction of stress-strain relationship with an improved Anand constitutive Model For lead-free solder Sn-3.5Ag , 2005, IEEE Transactions on Components and Packaging Technologies.