Microfabrication of Si/SiO 2 –Spherical Shells as a Path to Sub-mm 3 Autonomous Robotic Systems

[1]  B. Warneke,et al.  Controlled pulse-etching with xenon difluoride , 1997, International Conference on Solid-State Sensors, Actuators and Microsystems.

[2]  K. Pister,et al.  Solar powered 10 mg silicon robot , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.