Rapid Annealing of Silicon
暂无分享,去创建一个
R. T. Hodgson | Vaughn R. Deline | V. Deline | F. Morehead | R. Hodgson | J. Gelpey | F. F. Morehead | S. M. Mader | Jeffrey C. Gelpey | S. Mader
[1] V. Labunov,et al. Annealing of Antimony Implanted Silicon with Halogen Lamp Irradiation , 1982 .
[2] Heiner Ryssel,et al. Ion Implantation Techniques , 1982 .
[3] M. Y. Tsai,et al. Shallow junctions by high‐dose As implants in Si: experiments and modeling , 1980 .
[4] S. Mader. Annealing and Residual Damage , 1982 .
[5] H. Werner,et al. Experimental Analysis of Concentration Profiles of Boron Implanted in Silicon , 1973 .
[6] B. Crowder. Ion Implantation in Semiconductors and Other Materials , 1973 .