Grain‐boundary electromigration in thin films II. Tracer measurements in pure Au

The first direct measurement of the grain‐boundary ion drift velocity in thin Au films over the temperature range 120–250 °C is reported. Central regions on the narrow stripe conductors were selectively embedded with 195Au tracer atoms and the extent of the subsequent transport was evaluated by a high‐resolution autoradiography technique employing the scanning electron microscope. In one operating mode, the secondary electron image of the exposed Ag grains in the photographic emulsion was revealed. The second mode of operation involved detection of fluorescent Ag‐Lα x rays, generated upon impingement of the finely focused electron beam on the Ag grains. The resultant spatial dependence of the x‐ray intensity was ultimately converted into tracer activity profiles. It was found (1) that Ion transport in grain boundaries of Au is anode directed (this is the case whether or not a Mo glue layer is present), (2) that the ion drift velocity in grain boundaries can be expressed as V=[(5.7±0.6) ×10−2j/T] exp [−(0....

[1]  H. B. Huntington,et al.  Current-induced marker motion in gold wires☆ , 1961 .

[2]  A. Lodding,et al.  Current induced motion of lattice defects in indium metal , 1965 .

[3]  Robert Rosenberg,et al.  RESISTANCE MONITORING AND EFFECTS OF NONADHESION DURING ELECTROMIGRATION IN ALUMINUM FILMS , 1968 .

[4]  R. Sizmann,et al.  Self‐Diffusion Measurements in Gold Single Crystals between 286 and 412°C , 1969 .

[5]  Rolf E. Hummel,et al.  ON THE DIRECTION OF ELECTROMIGRATION IN THIN SILVER, GOLD, AND COPPER FILMS , 1971 .

[6]  J. Weise.  Quantitative measurements of the mass distribution in thin films during electrotransport experiments , 1972 .

[7]  P. Ghate,et al.  Electromigration‐Induced Failures in, and Microstructure and Resistivity of, Sputtered Gold Films , 1972 .

[8]  B. J. Klein.  Electromigration in thin gold films , 1973 .

[9]  F. d'Heurle,et al.  The activation energy for electromigration and grain-boundary self-diffusion in gold , 1973 .

[10]  R. Sorbello,et al.  A pseudopotential based theory of the driving forces for electromigration in metals , 1973 .

[11]  D. Gupta.  Self-Diffusion along Dislocations in Single-Crystal Au Films , 1973 .

[12]  P. A. Turner,et al.  Electromigration of Ti–Au thin‐film conductors at 180° C , 1974 .

[13]  D. Gupta,et al.  Grain boundary self-diffusion in evaporated Au films at low temperatures , 1974 .

[14]  D. Gupta.  On the direct measurement of diffusion at temperatures less than 0.5 Tm , 1975 .

[15]  E. Kinsbron,et al.  Electromigration in thin gold films on molybdenum surfaces , 1975 .

[16]  M. Ohring,et al.  Lateral self-diffusion and electromigration in thin metal films , 1975 .

[17]  Rolf E. Hummel,et al.  Activation energy for electrotransport in thin silver and gold films , 1975 .

[18]  Milton Ohring,et al.  Tracer self‐diffusion and electromigration in thin tin films , 1976 .

[19]  M. Ohring,et al.  Grain‐boundary electromigration in thin films. I. Low‐temperature theory , 1977 .