A CMOS on-chip temperature sensor with −0.21°C 0.17 °C inaccuracy from −20 °C to 100 °C

An accurate, small, low-power CMOS temperature sensor for on-chip thermal monitoring is proposed. The temperature sensor utilizes the temperature characteristics of the threshold voltage of a MOS transistor to sense temperature and is quite linear over the in temperature range (-20C, 100°C). The threshold-based temperature sensors were designed in the ON Semiconductor 1P6M (Single Poly, 6 Metal) 180nm process with a 1.8V supply voltage. The die area of this circuit is only 14.8μm×22.2μm. It has low power consumption of about 1.026μW at a 1% duty cycle. Measurement results show that a batch of 5 temperature sensors have a nonlinear error bounded of -0.21°C to +0.17°C with a one-point calibration and batch slope/curvature correction over the target operating temperature range (-20°C, 100°C).

[1]  Degang Chen,et al.  Multi-threshold transistors cell for Low Voltage temperature sensing applications , 2011, 2011 IEEE 54th International Midwest Symposium on Circuits and Systems (MWSCAS).

[2]  Kofi A. A. Makinwa,et al.  A CMOS temperature sensor with a voltage-calibrated inaccuracy of ±0.15°C (3σ) from −55 to 125°C , 2012, 2012 IEEE International Solid-State Circuits Conference.

[3]  Kofi A. A. Makinwa,et al.  A 1.2V 10µW NPN-based temperature sensor in 65nm CMOS with an inaccuracy of ±0.2°C (3s) from −70°C to 125°C , 2010, 2010 IEEE International Solid-State Circuits Conference - (ISSCC).

[4]  Amine Bermak,et al.  Correction to "A Sub- μ W Embedded CMOS Temperature Sensor for RFID Food Monitoring Application" [Jun 10 1246-1255] , 2010, IEEE J. Solid State Circuits.

[5]  Degang Chen,et al.  Highly linear very compact untrimmed on-chip temperature sensor with second and third order temperature compensation , 2010, 2010 53rd IEEE International Midwest Symposium on Circuits and Systems.

[6]  K. Asada,et al.  A Temperature Sensor With an Inaccuracy of ${-}{\hbox{1}}/{+}{\hbox{0.8}}\ ^{\circ}$ C Using 90-nm 1-V CMOS for Online Thermal Monitoring of VLSI Circuits , 2008, IEEE Transactions on Semiconductor Manufacturing.

[7]  Joseph Shor,et al.  Ratiometric BJT-based thermal sensor in 32nm and 22nm technologies , 2012, 2012 IEEE International Solid-State Circuits Conference.