Ion beam lithography for Fresnel zone plates in X-ray microscopy.

Fresnel Zone Plates (FZP) are to date very successful focusing optics for X-rays. Established methods of fabrication are rather complex and based on electron beam lithography (EBL). Here, we show that ion beam lithography (IBL) may advantageously simplify their preparation. A FZP operable from the extreme UV to the limit of the hard X-ray was prepared and tested from 450 eV to 1500 eV. The trapezoidal profile of the FZP favorably activates its 2nd order focus. The FZP with an outermost zone width of 100 nm allows the visualization of features down to 61, 31 and 21 nm in the 1st, 2nd and 3rd order focus respectively. Measured efficiencies in the 1st and 2nd order of diffraction reach the theoretical predictions.

[1]  J. Giérak,et al.  High resolution and high density ion beam lithography employing HSQ resist , 2012 .

[2]  E. Anderson,et al.  Soft X-ray microscopy at a spatial resolution better than 15 nm , 2005, Nature.

[3]  M. Carvalho,et al.  Focusing systems for the generation of X-ray micro beam: An overview , 2012 .

[4]  Ampere A Tseng,et al.  Recent developments in nanofabrication using focused ion beams. , 2005, Small.

[5]  Q. Shen,et al.  Takagi-taupin description of x-ray dynamical diffraction from diffractive optics with large numerical aperture. , 2007, 0704.3982.

[6]  Jacques Gierak,et al.  Exploration of the ultimate patterning potential achievable with focused ion beams. , 2005, Ultramicroscopy.

[7]  Y. Chu,et al.  High-resolution hard-x-ray microscopy using second-order zone-plate diffraction , 2011 .

[8]  J. Budai,et al.  The Race to X-ray Microbeam and Nanobeam Science , 2011, Science.

[9]  A. Cho.  Materials science. What shall we do with the x-ray laser? , 2010, Science.

[10]  Y. Vladimirsky,et al.  Moiré method and zone plate pattern inaccuracies , 1988 .

[11]  Raj Mittra,et al.  Resolving Power of a Zone Plate , 1967 .

[12]  Frank Sukowski,et al.  Laboratory X-ray microscopy with a nano-focus X-ray source , 2011 .

[13]  Jörg Raabe,et al.  Advanced thin film technology for ultrahigh resolution X-ray microscopy. , 2009, Ultramicroscopy.

[14]  T. Wilhein,et al.  Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength. , 2012, Optics letters.

[15]  G. Schmahl,et al.  Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy , 1982, Other Conferences.

[16]  Janos Kirz,et al.  Phase zone plates for x rays and the extreme uv , 1974 .

[17]  J. Melngailis,et al.  Focused ion beam lithography , 1991 .

[18]  M. Murnane,et al.  Bright Coherent Ultrahigh Harmonics in the keV X-ray Regime from Mid-Infrared Femtosecond Lasers , 2012, Science.

[19]  Markus A. Weigand,et al.  The X-ray microscopy beamline UE46-PGM2 at BESSY , 2010 .

[20]  Jörg Maser,et al.  Coupled wave description of the diffraction by zone plates with high aspect ratios , 1992 .

[21]  A. Sakdinawat,et al.  Nanoscale X-ray imaging , 2009 .

[22]  Giorgio Margaritondo,et al.  Hard-X-ray Zone Plates: Recent Progress , 2012, Materials.

[23]  John Melngailis.  Focused ion beam lithography , 1993 .

[24]  Massimo Gentili,et al.  High resolution fresnel zone plates for soft x-rays , 1994 .

[25]  W. Chao,et al.  Real space soft x-ray imaging at 10 nm spatial resolution. , 2012, Optics express.

[26]  J. Baglin,et al.  Ion beam nanoscale fabrication and lithography—A review , 2012 .

[27]  Gisela Schütz,et al.  Ion beam lithography for direct patterning of high accuracy large area X-ray elements in gold on membranes , 2012 .

[28]  Ehrenfried Zschech,et al.  Devices, Materials, and Processes for Nanoelectronics: Characterization with Advanced X‐Ray Techniques Using Lab‐Based and Synchrotron Radiation Sources , 2011 .

[29]  S. Mangles.  X-rays from self-reflection , 2012, Nature Photonics.

[30]  R. Bionta,et al.  Hard X-ray Sputtered-Sliced Phase Zone Plates , 1993 .

[31]  Erik L Ritman,et al.  Current status of developments and applications of micro-CT. , 2011, Annual review of biomedical engineering.

[32]  A. Kuyumchyan,et al.  High-efficiency and low-absorption Fresnel compound zone plates for hard X-ray focusing , 2002, SPIE Optics + Photonics.

[33]  Ferenc Krausz,et al.  Laser-driven soft-X-ray undulator source , 2009 .

[34]  S. Rehbein,et al.  Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39nm structures. , 2011, Ultramicroscopy.

[35]  Exploration of the ultimate patterning potential achievable with focused ion beams , 2005 .

[36]  D. Joy.  SMART – a program to measure SEM resolution and imaging performance , 2002, Journal of microscopy.

[37]  P. Thibault,et al.  Transmission and emission x-ray microscopy: operation modes, contrast mechanisms and applications , 2011, Journal of physics. Condensed matter : an Institute of Physics journal.

[38]  S. Rehbein,et al.  Characterization of the resolving power and contrast transfer function of a transmission X-ray microscope with partially coherent illumination. , 2012, Optics express.

[39]  S. Lagomarsino,et al.  Focused ion beam fabrication procedures of x-ray micro Fresnel zone plates , 2007 .

[40]  Roger W. Falcone,et al.  New directions in X-ray microscopy , 2011 .

[41]  P. Ilinski,et al.  X-ray zone plate fabrication using a focused ion beam , 2000, SPIE Optics + Photonics.

[42]  K. Bourzac.  Tabletop X-rays light up , 2012, Nature.