Investigation of acoustic sensing for laser machining processes Part 1: Laser drilling

Abstract An acoustic sensing technique has been developed for the in-process sensing of the erosion front condition during laser machining. This paper presents an analysis of acoustic sensing for blind and through-hole drilling. Theoretical analysis of the relationship between resonant frequency and hole geometry were performed using a Helmholtz resonator and wave equation models. The theoretical estimates are compared to experimental results for the laser drilling of acrylic, aluminum oxide and steel. Process control schemes for hole depth and beam break-through regulation using acoustic sensing are proposed.