Micromachined 38 GHz cavity resonator and filter with rectangular-coaxial feed-lines

Micromachined, multilayer cavity resonators and filters at 38 GHz are demonstrated. Each layer is made of gold-coated silicon, structured by deep reactive etching. Two external coupling structures by coaxial feed lines are proposed to suit the fabrication process. The measured resonator gives an unloaded Q-value of 343 at 38 GHz. Methods to further improve the resonator quality-factors are discussed. The measured insertion loss of the filter is 1.01 dB, the 3 dB bandwidth is from 36.53 to 39.13 GHz, and the return loss is better than −15 dB over the frequency range from 37.0 to 38.6 GHz.

[1]  J. R. Reid,et al.  Gold-Plated Micromachined Millimeter-Wave Resonators Based on Rectangular Coaxial Transmission Lines , 2007, IEEE Transactions on Microwave Theory and Techniques.

[2]  M. Stickel,et al.  A millimeter-wave bandpass waveguide filter using a width-stacked silicon bulk micromachining approach , 2006, IEEE Microwave and Wireless Components Letters.

[3]  George V. Eleftheriades,et al.  High-Q silicon micromachined cavity resonators at 30 GHz using the split-block technique , 2004 .

[4]  Gabriel M. Rebeiz,et al.  Conductor-loss limited stripline resonator and filters , 1996 .

[5]  Jiafeng Zhou,et al.  Design and High Performance of a Micromachined $K$ -Band Rectangular Coaxial Cable , 2007, IEEE Transactions on Microwave Theory and Techniques.

[6]  Gabriel M. Rebeiz,et al.  A high-performance integrated K-band diplexer , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[7]  J. R. Reid,et al.  Micromachined rectangular-coaxial transmission lines , 2006, IEEE Transactions on Microwave Theory and Techniques.

[8]  Gabriel M. Rebeiz.  RF MEMS: Theory, Design and Technology , 2003 .

[9]  Yi Wang,et al.  Design and realisation of low loss air‐filled rectangular coaxial cable with bent quarter‐wavelength supporting stubs , 2008 .

[10]  Z. Popovic,et al.  Modeling, Design, Fabrication, and Performance of Rectangular μ-Coaxial Lines and Components , 2006, 2006 IEEE MTT-S International Microwave Symposium Digest.

[11]  Z. Popovic,et al.  Quasi-planar high-Q millimeter-wave resonators , 2006, IEEE Transactions on Microwave Theory and Techniques.

[12]  J. Papapolymerou,et al.  A micromachined high-Q X-band resonator , 1997 .

[13]  Jia-Sheng Hong,et al.  Microstrip filters for RF/microwave applications , 2001 .

[14]  J. M. Chamberlain,et al.  Fabrication and characterization of micromachined rectangular waveguide components for use at millimeter-wave and terahertz frequencies , 2000 .

[15]  C. E. Collins,et al.  A new micro-machined millimeter-wave and terahertz snap-together rectangular waveguide technology , 1999 .