Metal-catalyzed electroless etching of silicon in aerated HF/H2O vapor for facile fabrication of silicon nanostructures.

Inspired by metal corrosion in air, we demonstrate that metal-catalyzed electroless etching (MCEE) of silicon can be performed simply in aerated HF/H2O vapor for facile fabrication of three-dimensional silicon nanostructures such as silicon nanowires (SiNW) arrays. Compared to MCEE commonly performed in aqueous HF solution, the present pseudo gas phase etching offers exceptional simplicity, flexibility, environmental friendliness, and scalability for the fabrication of three-dimensional silicon nanostructures with considerable depths because of replacement of harsh oxidants such as H2O2 and AgNO3 by environmental-green and ubiquitous oxygen in air, minimum water consumption, and full utilization of HF.

[1]  T. Yen,et al.  Morphological Control of Single‐Crystalline Silicon Nanowire Arrays near Room Temperature , 2008 .

[2]  A. Majumdar,et al.  Enhanced thermoelectric performance of rough silicon nanowires , 2008, Nature.

[3]  S. Ohnishi,et al.  Selective Etching of Phosphosilicate Glass with Low Pressure Vapor HF , 1995 .

[4]  A. Majumdar,et al.  Enhanced Thermoelectric Performance of Rough Silicon Nanowires. , 2008 .

[5]  Peidong Yang,et al.  Silicon nanowire radial p-n junction solar cells. , 2008, Journal of the American Chemical Society.

[6]  Caroline A. Ross,et al.  Densely Packed Arrays of Ultra‐High‐Aspect‐Ratio Silicon Nanowires Fabricated using Block‐Copolymer Lithography and Metal‐Assisted Etching , 2009 .

[7]  Nadine Geyer,et al.  Ordered arrays of vertically aligned [110] silicon nanowires by suppressing the crystallographically preferred <100> etching directions. , 2009, Nano letters.

[8]  Zhipeng Huang,et al.  Sub-20 nm Si/Ge superlattice nanowires by metal-assisted etching. , 2009, Nano letters.

[9]  Hui Fang,et al.  Metal-particle-induced, highly localized site-specific etching of Si and formation of single-crystalline Si nanowires in aqueous fluoride solution. , 2006, Chemistry.

[10]  Yunjie Yan,et al.  Aligned single-crystalline Si nanowire arrays for photovoltaic applications. , 2005, Small.

[11]  Zhipeng Huang,et al.  Extended arrays of vertically aligned sub-10 nm diameter [100] Si nanowires by metal-assisted chemical etching. , 2008, Nano letters.

[12]  Hitoshi Habuka,et al.  Reaction of hydrogen fluoride gas at high temperatures with silicon oxide film and silicon surface , 1998 .

[13]  C. Thompson,et al.  Fabrication of silicon nanopillar-based nanocapacitor arrays , 2010 .

[14]  N. Fang,et al.  Non-lithographic patterning and metal-assisted chemical etching for manufacturing of tunable light-emitting silicon nanowire arrays , 2010, CLEO/QELS: 2010 Laser Science to Photonic Applications.

[15]  Yin Wu,et al.  Uniform, axial-orientation alignment of one-dimensional single-crystal silicon nanostructure arrays. , 2005, Angewandte Chemie.

[16]  N. Fukumuro,et al.  Catalytic activity of noble metals for metal-assisted chemical etching of silicon , 2012, Nanoscale Research Letters.

[17]  N. Mitsugi,et al.  Pit Formation Induced by Copper Contamination on Silicon Surface Immersed in Dilute Hydrofluoric Acid Solution , 2004 .

[18]  A. Gawlik,et al.  Silicon nanowire-based solar cells on glass: synthesis, optical properties, and cell parameters. , 2009, Nano letters.

[19]  Yunjie Yan,et al.  Synthesis of Large‐Area Silicon Nanowire Arrays via Self‐Assembling Nanoelectrochemistry , 2002 .

[20]  Ning-Bew Wong,et al.  Ordered silicon nanowire arrays via nanosphere lithography and metal-induced etching , 2007 .

[21]  Zhipeng Huang,et al.  Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density , 2007 .

[22]  Xiaolin Zheng,et al.  Vertical transfer of uniform silicon nanowire arrays via crack formation. , 2011, Nano letters.

[23]  Yun Jeong Hwang,et al.  High density n-Si/n-TiO2 core/shell nanowire arrays with enhanced photoactivity. , 2009, Nano letters.

[24]  Wensheng Shi,et al.  Using Si and Ge nanostructures as substrates for surface-enhanced Raman scattering based on photoinduced charge transfer mechanism. , 2011, Journal of the American Chemical Society.

[25]  Shui-Tong Lee,et al.  Hybrid heterojunction solar cell based on organic-inorganic silicon nanowire array architecture. , 2011, Journal of the American Chemical Society.

[26]  Kui‐Qing Peng,et al.  Continuous-flow Mass Production of Silicon Nanowires via Substrate-Enhanced Metal-Catalyzed Electroless Etching of Silicon with Dissolved Oxygen as an Oxidant , 2014, Scientific Reports.

[27]  Ya Hu,et al.  Fabrication of Silicon Nanowire Arrays by Macroscopic Galvanic Cell‐Driven Metal Catalyzed Electroless Etching in Aerated HF Solution , 2014, Advanced materials.

[28]  Yun Jeong Hwang,et al.  Single crystalline mesoporous silicon nanowires. , 2009, Nano letters.

[29]  Xiuling Li,et al.  Metal-assisted chemical etching in HF/H2O2 produces porous silicon , 2000 .

[30]  Xin Wang,et al.  High-performance silicon nanohole solar cells. , 2010, Journal of the American Chemical Society.

[31]  T. Ohmi,et al.  Behavior of Ultrafine Metallic Particles on Silicon Wafer Surface , 1995 .

[32]  Wenjun Zhang,et al.  Silicon nanowires for rechargeable lithium-ion battery anodes , 2008 .

[33]  S. T. Lee,et al.  Fabrication of Single‐Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles , 2006 .

[34]  Karla S. Brammer,et al.  Antibiofouling, sustained antibiotic release by Si nanowire templates. , 2009, Nano letters.

[35]  Henry I. Smith,et al.  Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching. , 2008, Nano letters.

[36]  Kui‐Qing Peng,et al.  Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching , 2008 .

[37]  Michio Matsumura,et al.  Texturization of multicrystalline silicon wafers for solar cells by chemical treatment using metallic catalyst , 2006 .

[38]  W. K. Choi,et al.  Mechanics of Catalyst Motion during Metal Assisted Chemical Etching of Silicon , 2013 .

[39]  Li Li,et al.  Silicon/hematite core/shell nanowire array decorated with gold nanoparticles for unbiased solar water oxidation. , 2014, Nano letters.

[40]  K. Kolasinski Charge Transfer and Nanostructure Formation During Electroless Etching of Silicon , 2010 .

[41]  Xin Wang,et al.  Platinum nanoparticle decorated silicon nanowires for efficient solar energy conversion. , 2009, Nano letters.

[42]  Zhipeng Huang,et al.  Metal‐Assisted Chemical Etching of Silicon: A Review , 2011, Advanced materials.