Scientific Problems Originated from Key Techniques of Advanced Manufacturing Equipments

In this paper,the national requirements and development opportunities of the advanced manufacturing equipments are first analyzed.The major research and development works in advanced NC(Numerical Control) machine tools and very-large-scale integrated circuit equipments are then discussed.Based on the summarizations of the current states and development trends of these two types of manufacturing equipments,four scientific problems originated from the key techniques are presented.They cover high performance motion control,high-speed and high-precision driving,interaction mechanism between manufacturing process and machine tool,and environment control for high-precision manufacture.