A new nano-accuracy AFM system for minimizing Abbe errors and the evaluation of its measuring uncertainty.
暂无分享，去创建一个
[1] J. M. Paros,et al. Flexure Pivots to Replace Knife Edge and Ball Bearing , 1965 .
[2] K. Hasche,et al. 3D calibration of a scanning force microscope with internal laser interferometers , 1997 .
[3] R. Thalmann,et al. Long-range AFM profiler used for accurate pitch measurements , 1998 .
[4] S. Gonda,et al. REAL-TIME, INTERFEROMETRICALLY MEASURING ATOMIC FORCE MICROSCOPE FOR DIRECT CALIBRATION OF STANDARDS , 1999 .
[5] M. Pisani,et al. A sample scanning system with nanometric accuracy for quantitative SPM measurements. , 2001, Ultramicroscopy.
[6] Konrad Herrmann,et al. Calibrated scanning force microscope with capabilities in the subnanometre range , 2002 .
[7] Kiyoshi Takamasu,et al. Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope , 2003 .
[8] Liam Blunt,et al. Calibration of step heights and roughness measurements with atomic force microscopes , 2003 .
[9] D. Gweon,et al. Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors , 2005 .
[10] Byong Chon Park,et al. Measurement of microscope calibration standards in nanometrology using a metrological atomic force microscope , 2006 .