Simulation of the Impedance Response of Thin Films As a Function of Film Conductivity and Thickness

Using parametric finite element simulations, film conductivities were varied in order to understand the role of film properties and geometry on nanoscale dielectric and spectroscopy measurements. The quasi-static forms of Maxwell’s electromagnetic equations in time harmonic mode were solved using COMSOL Multiphysics 4.4. The calculations were performed for a wide range of electrode size, film thickness and film conductivities to understand the interaction among these important parameters. Film and substrate interactions occurred in some cases. It is shown that equivalent circuit modelling can be used to describe the trends seen. This work highlights some of the factors that become important in the measurement and correct interpretation of dielectric properties of thin films and / or micro/nanoscale structures.

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