Active Pixel Sensor Arrays in 90 / 65 nm CMOS-Technologies with vertically stacked photodiodes

S.Henker, C. Mayr, J.-U. Schlüßler, R. Schüffny, A. Heittmann, U. Ramacher 1 Univ. of Technology Dresden, Institute of Circuits and Systems (IEE), Helmholtzstr. 10, 01062 Dresden, Germany, {henker,mayr,schlue,schueffn}@iee.et.tu-dresden.de, Tel.: ++49 351 463 33602, Fax: ++49 351 463 37794 2 Qimonda AG, Munich, Germany, Arne.Heittmann@qimonda.com, Tel.: ++49 89 234 52067 3 Infineon AG, Munich, Germany, Ulrich.Ramacher@infineon.com, Tel.: ++49 89 234 41296

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