Scanning Electron Microscopy for Quantitative Small and Large Deformation Measurements Part I: SEM Imaging at Magnifications from 200 to 10,000

A series of baseline displacement measurements have been obtained using 2D Digital Image Correlation (2D-DIC) and images from Scanning Electron Microscopes (SEM). Direct correlation of subsets from a reference image to subsets in a series of uncorrected images is used to identify the presence of non-stationary step-changes in the measured displacements. Using image time integration and recently developed approaches to correct residual drift and spatial distortions in recorded images, results clearly indicate that the corrected SEM images can be used to extract deformations with displacement accuracy of ±0.02 pixels (1 nm at magnification of 10,000) and mean value strain measurements that are consistent with independent estimates and have point-to-point strain variability of ±1.5 × 10−4.