Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’
暂无分享,去创建一个
[1] J. F. W. Galyer,et al. Metrology for Engineers , 1969 .
[2] Andreas Vogel,et al. Establishing a flatness standard. , 1994, Applied optics.
[3] James C. Wyant,et al. Absolute testing of flats decomposed to even and odd functions , 1992, Optics & Photonics.
[4] Chris Evans,et al. Precision engineering : an evolutionary view , 1989 .
[5] W. de Bruin,et al. Some results of flatness measurement , 1981 .
[6] J. Schwider,et al. IV Interferometric Testing of Smooth Surfaces , 1976 .
[7] M. Raugh. Absolute two-dimensional sub-micron metrology for electron beam lithography: A calibration theory with applications☆ , 1985 .
[8] David J. Whitehouse,et al. Handbook of Surface Metrology , 2023 .
[9] J Grzanna,et al. Absolute flatness testing by the rotation method with optimal measuring-error compensation. , 1992, Applied optics.
[10] G. D. Dew. Some Observations on the Long-term Stability of Optical Flats , 1974 .
[11] Masanori Ohori,et al. Application of a New Straightness Measurement Method to Large Machine Tool , 1981 .
[12] Bernard S. Fritz,et al. Absolute Calibration Of An Optical Flat , 1984 .
[13] Rolfe Cobleigh. Handy Farm Devices And How To Make Them , 1996 .
[14] Li Jun,et al. In-situ measurement of cylindricity , 1990 .
[15] M. Debenham,et al. Determining gravitationl deformation of an optical flat by liquid surface interferometry , 1980 .
[16] S. L. Thompson,et al. Angle Interferometer Cross-Axis Errors , 1994 .
[17] Peter Z. Takacs,et al. Long Trace Profile Measurements On Cylindrical Aspheres , 1989, Optics & Photonics.
[18] W. de Bruin,et al. Determination of flatness from straightness measurements and characterization of the surface by four parameters , 1981 .
[19] Dean A. Ketelsen,et al. Optical Testing With Large Liquid Flats , 1989, Optics & Photonics.
[20] E. Thwaite,et al. The Calibration of Linear Scales by the Method of Hansen-Pérard , 1963 .
[21] H. Barrell,et al. Liquid Surface Interferometry , 1948, Nature.
[22] J. B. Bryan,et al. Compensation for Errors Introduced by Nonzero Fringe Densities in Phase-Measuring Interferometers , 1993 .
[23] J C Wyant,et al. Absolute measurement of surface roughness. , 1990, Applied optics.
[24] Michael Raugh. Self-Consistency and Transitivity in Self-Calibration Procedures , 1991 .
[25] Robert E. Parks. Removal Of Test Optics Errors , 1978, Optics & Photonics.
[26] J Schwider,et al. Precise measurement of planeness. , 1967, Applied optics.
[27] A. Clément,et al. Commande adaptive dimensionelle d'une machine a mesurer tridimensionelle , 1981 .
[28] Enrico Canuto,et al. Coordinate Measuring Machines and Machine Tools Selfcalibration and Error Correction , 1987 .
[29] W Tyler Estler,et al. Validation metrology of the large optics diamond turning machine , 1985 .
[30] W. T. Estler. Calibration And Use Of Optical Straightedges In The Metrology Of Precision Machines , 1985 .
[31] J. A. Soons,et al. Modeling the errors of multi-axis machines : a general methodology , 1992 .
[32] F. Jouy,et al. Theoretical Modelisation and Experimental Identification of the Geometrical Parameters of Coordinate-Machines by Measuring a Multi-Directed Bar , 1986 .
[33] S. Sartori,et al. Geometric Error Measurement and Compensation of Machines , 1995 .
[34] Charles P Reeve,et al. The calibration of indexing tables by subdivision , 1975 .
[35] J. Grzanna,et al. Absolute testing of flatness standards at square-grid points , 1990 .
[36] Johannes Schwider,et al. Grazing incidence interferometry applied to the measurement of cylindrical surfaces , 1995 .
[37] K L Shu. Ray-trace analysis and data reduction methods for the Ritchey-Common test. , 1983, Applied optics.
[38] Yutaka Yokoyama. A New Straightness Testing Instrument , 1970 .
[39] Ralph C. Veale,et al. Error Compensation of Coordinate Measuring Machines , 1985 .
[40] J C Wyant,et al. Absolute testing of flats by using even and odd functions. , 1993, Applied optics.
[41] Alan Campbell. Measurement of lathe Z-slide straightness and parallelism using a flat land , 1995 .
[42] P. D. Chapman. A capacitance based ultra-precision spindle error analyser , 1985 .
[43] D G Chetwynd,et al. Improving the accuracy of roundness measurement , 1976 .
[44] David J. Whitehouse,et al. Some theoretical aspects of error separation techniques in surface metrology , 1976 .
[45] John A. Simpson,et al. Foundations of Metrology. , 1981, Journal of research of the National Bureau of Standards.
[46] Charles P Reeve. A method of calibrating two-dimensional reference plates , 1974 .
[47] G D Dew,et al. The measurement of optical flatness. , 1966, Journal of scientific instruments.
[48] S. Sartori,et al. Towards Instrument-Oriented Calibration of CMMs , 1996 .
[49] R Bünnagel,et al. Fizeau interferometer for measuring the flatness of optical surfaces. , 1968, Applied optics.
[50] Peter Z. Takacs,et al. Design Of A Long Trace Surface Profiler , 1987, Photonics West - Lasers and Applications in Science and Engineering.
[51] D. Malacara. Optical Shop Testing , 1978 .
[52] Masanori Ohori,et al. A New Method for the Measurement of the Straightness of Machine Tools and Machined Work , 1982 .
[53] C. Evans,et al. Test optics error removal. , 1996, Applied optics.