Computer-Aided Engineering of Semiconductor Integrated Circuits.

Abstract : The objectives of this program are to remove the empiricism associated with the design and manufacturing of custom integrated circuits for military applications and to reduce the cost of these circuits by devising improved computer-aided engineering techniques. Efforts of research covered by this report are in the areas of (1) ion implantation and diffusion of dopants, (2) thermal oxidation, (3) chemical vapor deposition of silicon, and (4) device simulation and statistical circuit modeling.