Location-controlled-grain Technique for Monolithic 3D BEOL FinFET Circuits
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C. Hu | W. Yeh | Kuan-Neng Chen | C. Shen | J. Shieh | Chih-Chao Yang | Po-Tsang Huang | Meng-Chyi Wu | Tung-Ying Hsieh | Wan-Chi Wu | Shih-Wei Chen | Chia-He Chang | Wan-Chi Wu