보간법을 이용한 과구동 4축 스테이지의 오차 보정결과

In this study, the calibration process is executed for an over-actuated precision stage, which is designed for alignment process in nano-imprint fabrication process. We measured the positional accuracy of the stage for the X-Y axis to identify position errors and performed the calibration procedure by using a lookup table and interpolation. As a result, the precision stage is calibrated to have position errors of less than 1 micrometer in X and Y axis.