Fabrication and characterization of microlens arrays using a cantilever-based spotter.

We present a quantitative study on the fabrication of microlenses using a low-cost polymer dispending technique. Our method is based on the use of a silicon micro-cantilever robotized spotter system. We first give a detailed description of the technique. In a second part, the fabricated microlenses are fully characterized by means of SEM (Scanning Electron Microscope), AFM (Atomic Force Microscopy) non contact optical profilometry and Mach-Zehnder interferometry. Diameters in the range [25-130mum] are obtained with an average surface roughness of 2.02nm. Curvature radii, focal lengths as well as aberrations are also measured for the first time: the fabricated microlenses present focal lengths in the range [55-181mum] and exhibit high optical quality only limited by diffraction behaviour with RMS aberration lower than lambda/14.

[1]  H. Herzig.  Micro-Optics : Elements, Systems And Applications , 1997 .

[2]  Hugo Thienpont,et al.  Two-dimensional plastic microlens arrays by deep lithography with protons: fabrication and characterization , 2002 .

[3]  Yvan Segui,et al.  Design and fabrication of polymer microlenses arrays for VCSELs using a cantilever based microsystem , 2006, SPIE Photonics Europe.

[4]  Michael T. Gale,et al.  Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists , 1994 .

[5]  Hans Peter Herzig,et al.  Comparing glass and plastic refractive microlenses fabricated with different technologies , 2006 .

[6]  Juergen Mohr,et al.  Fabrication and characterization of microlenses realized by a modified LIGA process , 1997 .

[7]  D. MacFarlane,et al.  Microjet fabrication of microlens arrays , 1994, IEEE Photonics Technology Letters.

[8]  Martin A. M. Gijs,et al.  Micro-replication of optical lenses in glass using a novel sol gel technology , 2002 .

[9]  O. Soppera,et al.  Fabrication of microlenses by direct photo-induced crosslinking polymerization , 2000 .

[10]  Christian Bergaud,et al.  Cantilever-based microsystem for contact and non-contact deposition of picoliter biological samples , 2004 .

[11]  Hugo Thienpont,et al.  Direct writing of microlenses in polycarbonate with excimer laser ablation. , 2003, Applied optics.

[12]  G. Connell,et al.  Technique for monolithic fabrication of microlens arrays. , 1988, Applied optics.

[13]  Levi A. Gheber,et al.  Nano fountain pen manufacture of polymer lenses for nano-biochip applications. , 2006, Nano letters.