Polysilicon cantilever beam using surface micromachining technology for application in microswitches

Our project is the realization of monolithic loaded line phase shifters for hyperfrequency signals supplying planar antennas. Phase shifters include poly-Si microswitches taking the place of the usual PIN diodes. To this aim, undoped polysilicon cantilever beams were produced by surface micromachining. Results on the stress non uniformity and the stiction problem encountered during the process are reported.