Critical tools identification and characteristics curves construction in a wafer fabrication facility

The purpose of this research was to identify the factors in a wafer fabrication facility that significantly affect the cycle times of two main technologies that are currently in process and in demand for the next few years. Moreover, the goal was to construct the characteristics curves that would provide information about the different capabilities of a wafer fabrication facility for several improvement scenarios. A valid simulation model of the whole production line of the fabrication facility was built. The input factors in the fab that significantly affect cycle time, were identified through factor screening experiments. Based on these factors, several scenarios involving addition of tools, were identified and the characteristics curves were constructed for each scenario. These characteristics curves were used to relate cycle time to production volume capacities.

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