Evaluation of Mechanical Properties of MEMS Materials and Their Standardization

The importance of the mechanical properties evaluation on designing and evaluating MEMS and the development of standard on MEMS are described in this chapter. First, in order to confi rm their importance, the effect of mechanical properties on the performance of MEMS is pointed out. Second, to reveal the accuracy and repeatability of the existing evaluation methods, a work for cross comparisons is described. Then, the current workings on the international standard development on thin fi lm mechanical properaties to improve the reliability, repeatability, and accuracy in the mechanical properties evaluation are introduced.

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