Plasma-enhanced atomic layer deposition for plasmonic TiN
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Adam M. Schwartzberg | Scott Dhuey | Deirdre L. Olynick | D. Frank Ogletree | Bethanie J. H. Stadler | Lauren M. Otto | Aaron T. Hammack | Shaul Aloni | S. Aloni | L. M. Otto | A. Schwartzberg | S. Dhuey | D. Olynick | A. Hammack | B. Stadler | D. Ogletree
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