Design, optimization and construction of MEMS-based micro grippers for cell manipulation

The need of micromanipulation devices has been growing rapidly during the last decades, specially in the fields of Biology and Micro-Assembly, and many solutions have been proposed to cope with the increasing demand. The present paper suggests a possible way to micromanipulating objects in various conditions, adopting MEMS technologies to develop a microgripper based on a new flexural hinge, recently patented by the Authors. The micromechanism has been modified considering results obtained through FEA. Finally, a brief description of the construction process is provided, together with some experimental activities.

[1]  Imre J. Rudas,et al.  Isotropy in any RR planar dyad under active joint stiffness regulation , 2010, 19th International Workshop on Robotics in Alpe-Adria-Danube Region (RAAD 2010).

[2]  Ettore Pennestrì,et al.  On the numerical computation of Generalized Burmester Points , 1995 .

[3]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[4]  Bijan Shirinzadeh,et al.  Development of a high precision flexure-based microgripper , 2009 .

[5]  Chan-Woo Moon,et al.  Fabrication and property analysis of a MEMS micro-gripper for robotic micro-manipulation , 2012 .

[6]  John T. Wen,et al.  Design of Compliant MEMS Grippers for Micro-Assembly Tasks , 2006, 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[7]  David Wood,et al.  Design and testing of a polymeric microgripper for cell manipulation , 2007 .

[8]  Tao Chen,et al.  Design and Fabrication of a Four-Arm-Structure MEMS Gripper , 2009, IEEE Transactions on Industrial Electronics.

[9]  Imre J. Rudas,et al.  Active Joint Stiffness Regulation to Achieve Isotropic Compliance in the Euclidean Space , 2012 .

[10]  Han Zhang,et al.  Robotic micro-assembly of scaffold/cell constructs with a shape memory alloy gripper , 2002, Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292).

[11]  Marco Balucani,et al.  The development of a MEMS/NEMS-based 3 D.O.F. compliant micro robot , 2010, 19th International Workshop on Robotics in Alpe-Adria-Danube Region (RAAD 2010).

[12]  Zhaowei Zhong,et al.  A microgripper using piezoelectric actuation for micro-object manipulation , 2007 .

[13]  Han Zhang,et al.  Shape memory alloy microgripper for robotic microassembly of tissue engineering scaffolds , 2004, IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA '04. 2004.

[14]  Yu Sun,et al.  Nanonewton force-controlled manipulation of biological cells using a monolithic MEMS microgripper with two-axis force feedback , 2008 .

[15]  Ettore Pennestrì,et al.  Modular third-order analysis of planar linkages with applications , 1994 .

[16]  B. Nelson,et al.  Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field , 2007, Journal of Microelectromechanical Systems.

[17]  Bradley J. Nelson,et al.  Design of a Micro-Gripper and an Ultrasonic Manipulator for Handling Micron Sized Objects , 2006, 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[18]  Yanling Tian,et al.  Design and forward kinematics of the compliant micro-manipulator with lever mechanisms , 2009 .

[19]  Ettore Pennestrì,et al.  An atlas of linkage-type robotic grippers , 1997 .

[20]  Mohsen Hamedi,et al.  Simulation and experimental investigation of a novel electrostatic microgripper system , 2012 .

[21]  Yves Bellouard Microrobotics: Methods and Applications , 2009 .