A high accuracy algorithm of displacement measurement for a micro-positioning stage

A high accuracy displacement measurement algorithm for a two degrees of freedom compliant precision micro-positioning stage is proposed based on the computer micro-vision technique. The algorithm consists of an integer-pixel and a subpixel matching procedure. Series of simulations are conducted to verify the proposed method. The results show that the proposed algorithm possesses the advantages of high precision and stability, the resolution can attain to 0.01 pixel theoretically. In addition, the consuming time is reduced about 6.7 times compared with the classical normalized cross correlation algorithm. To validate the practical performance of the proposed algorithm, a laser interferometer measurement system (LIMS) is built up. The experimental results demonstrate that the algorithm has better adaptability than that of the LIMS.

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