Manipulation and assembly of three-dimensional microparts produced by two-photon photo polymerization

Microassembly has been identified as one of critical techniques in innovating the promising era of micro/nano technology. Several works have been investigated to fabricate various micro-devices such as micro-sensors and microactuators. Assembly plays an important role for fabricating micro-devices. However, there are only few studies in the assembly of microparts. In this paper, we present manipulation and assembly of three-dimensional microparts produced by two-photon polymerization where optical trapping technique was used to manipulate microparts. We show exemplary microassembly formed by assembling two microparts, a movable female part and a male part fixed on a glass substrate.

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