High rate growth of thick diamond films by high-current hot-cathode PCVD
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Zhigang Jiang | Zeng-sun Jin | Xu Han | Jiayu Wang | Y. Bai | Hanhua Wu | X. Lv
[1] Zhigang Jiang,et al. Influence of cathode temperature on gas discharge and growth of diamond films in DC-PCVD processing , 2005 .
[2] Toshimichi Ito,et al. Homoepitaxial diamond growth by high-power microwave-plasma chemical vapor deposition , 2004 .
[3] A. Fernandes,et al. Influence of nucleation density on film quality, growth rate and morphology of thick CVD diamond films , 2003 .
[4] J. Schermer,et al. On the mechanism of texturing during flame deposition of diamond , 2002 .
[5] K. J. Gray,et al. Free-standing CVD diamond wafers for thermal management by d.c. arc jet technology , 1999 .
[6] J. S. Aitchison,et al. Micromachined pattern transfer into CVD diamond , 1998 .
[7] G. Zou,et al. The deposition of diamond film with high thermal conductivity , 1997 .
[8] A. Malshe,et al. Reactive ion etching of diamond as a means of enhancing chemically-assisted mechanical polishing efficiency , 1997 .
[9] K. J. Gray,et al. Design-to-implementation case studies of CVD diamond in r.f./microwave package and detector applications , 1997 .
[10] M. N. Petukhov,et al. The roles of H and O atoms in diamond growth , 1997 .
[11] E. Cappelli,et al. Relation among growth rate, microstructure and the physical properties of diamond films , 1996 .
[12] Kazuhiro Baba,et al. Thermal conductivity of diamond films , 1991 .
[13] Wang,et al. Detailed surface and gas-phase chemical kinetics of diamond deposition. , 1991, Physical review. B, Condensed matter.
[14] S. Harris,et al. Effects of oxygen on diamond growth , 1989 .