PDMS 3차원 구조물의 성형 및 전이를 위한 기계 정렬기구와 이를 이용한 단순 정렬 기법

Simple alignment technique is proposed for easy molding and transfer of PDMS 3D structure. In order to realized the suggested technique, specially designed mechanical guiding jig is devised. The jig can help alignment of mold wafers using mechanical guiding and clamping without any complex alignment steps. PDMS 3D caps for sensor package has been molded and transferred to sensor using the suggested technique and jig. Though principle of alignment is very simple, high alignment precision of 10㎛ is achieved with high transfer-yield.