论文信息 - Homoepitaxial Growth of 4H-SiC Using CH3Cl Carbon Precursor - 字舞流文

Homoepitaxial Growth of 4H-SiC Using CH3Cl Carbon Precursor

M. Mazzola | Y. Koshka | Galyna Melnychuck | H. Lin | J. Wyatt | Huang-de Lin