Effects of annealing on the interfacial properties and energy-band alignment of AlN dielectric on 4H–SiC
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Zhanwei Shen | Jun Chen | Xingfang Liu | Wanshun Zhao | Guosheng Sun | Yiping Zeng | Lei Wang | Bowen Lv | Yinshu Wang | Zhao Fu | Feng Zhang | Guoguo Yan