A Novel – Pulsed Digital Oscillator ( PDO ) for MEMS
暂无分享,去创建一个
Jordi Ricart | Joan Pons-Nin | Agustín Bermejo | Eduardo Figueras Costa | J. Pons-Nin | M. Domínguez | J. Ricart | E. F. Costa | A. Bermejo | Manuel Domínguez
[1] Alan V. Oppenheim,et al. Discrete-time Signal Processing. Vol.2 , 2001 .
[2] Dong-Il Cho,et al. Surface/bulk micromachined single-crystalline-silicon micro-gyroscope , 2000, Journal of Microelectromechanical Systems.
[3] David Wood,et al. A silicon membrane gyroscope with electrostatic actuation , 1996 .
[4] R. Howe,et al. Multimode digital control of a suspended polysilicon microstructure , 1996 .
[5] J. Vandewalle,et al. Periodic and chaotic behaviour of the autonomous impact resonator , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
[6] Michiel Steyaert,et al. An Oscillator Circuit For Electrostatically Driven Silicon-based One-port Resonators , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[7] Yong-Soo Oh,et al. A vacuum packaged differential resonant accelerometer using gap sensitive electrostatic stiffness changing effect , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).
[8] Novel electrostatic repulsion forces in MEMS applications by nonvolatile charge injection , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).
[9] Hao Luo,et al. A copper CMOS-MEMS Z-axis gyroscope , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).
[10] Luis Castañer,et al. Analysis of the extended operation range of electrostatic actuators by current-pulse drive , 2001 .
[11] Sangkyung Sung,et al. Development of a tunable resonant accelerometer with self-sustained oscillation loop , 2000, Proceedings of the IEEE 2000 National Aerospace and Electronics Conference. NAECON 2000. Engineering Tomorrow (Cat. No.00CH37093).
[12] C. Nguyen,et al. Design of low actuation voltage RF MEMS switch , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).
[13] J. Ricart,et al. A sigma-delta digital oscillator for MEMS , 2003, Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498).