Suppression of anomalous threshold voltage increase with area scaling for Mg- or La-incorporated high-k/Metal gate nMISFETs in deeply scaled region
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A. Uedono | T. Chikyow | M. Sato | T. Morooka | K. Shiraishi | K. Yamada | T. Nabatame | J. Yugami | S. Miyazaki | K. Ohmori | T. Matsuki | K. Ikeda | Y. Ohji | T. Suzuki