Thermodynamic simulation of atmospheric DLI-CVD processes for the growth of chromium-based hard coatings using bis(benzene)chromium as molecular source

[1]  F. Maury,et al.  Nanocrystalline chromium-based coatings deposited by DLI-MOCVD under atmospheric pressure from Cr(CO)6 , 2006 .

[2]  C. Bernard,et al.  Vapor Transport Processing: Models and Simulations , 2005 .

[3]  F. Maury,et al.  Low Temperature Metallorganic Chemical Vapor Deposition Routes to Chromium Metal Thin Films Using Bis(benzene)chromium , 1999 .

[4]  R. Madar,et al.  Thermodynamic modeling of the Ti-Al-N system and application to the simulation of CVD processes of the (Ti, Al)N metastable phase , 1999 .

[5]  F. Maury,et al.  A Thermodynamic Approach to the CVD of Chromium and of Chromium Carbides Starting from Cr(C6H6)2 , 1998 .

[6]  F. Weiss,et al.  Thin YBCO films on (001) substrates grown by injection MOCVD , 1997 .

[7]  F. Maury,et al.  Selection of metalorganic precursors for MOCVD of metallurgical coatings: application to Cr-based coatings , 1996 .

[8]  F. Maury,et al.  Characterization of chromium nitride and carbonitride coatings deposited at low temperature by organometallic chemical vapour deposition , 1991 .

[9]  K. Frisk.  A thermodynamic evaluation of the CR-N, FE-N, MO-N and CR-MO-N systems , 1991 .

[10]  F. Maury,et al.  Structural characterization of chromium carbide coatings deposited at low temperature by low pressure chemical vapour decomposition using dicumene chromium , 1990 .

[11]  F. Schuster.  Dépôts chimiques en phase vapeur de revêtements durs issus du système Cr-N-C à partir de sources organométalliques , 1990 .

[12]  J. Andersson.  Thermodynamic properties of Cr-C , 1987 .

[13]  E. Westrum,et al.  Heat capacity and vapor pressure of crystalline bis(benzene)chromium. Third-law entropy comparison and thermodynamic evidence concerning the structure of bis(benzene)chromium , 1969 .

[14]  O. Redlich,et al.  Algebraic Representation of Thermodynamic Properties and the Classification of Solutions , 1948 .