Dislocation-Induced Energy Dissipation in a Tunable Trilayer Graphene Resonator

In crystalline materials, the creation and modulation of dislocations are often associated with plastic deformation and energy dissipation. Here we report a study on the energy dissipation of a trilayer graphene ribbon resonator. The vibration of the ribbon generates cyclic mechanical loading to the graphene ribbon, during which mechanical energy is dissipated as heat. Measuring the quality factor of the graphene resonator provides a way to evaluate the energy dissipation. The graphene ribbon is integrated with silicon micro actuators, allowing its in‐plane tension to be finely tuned. As we gradually increased the tension, we observed, in addition to the well‐known resonance frequency increase, a large change in the energy dissipation. We propose that the dominating energy dissipation mechanism shifts over three regions. With small applied tension, the graphene is in elastic region, and the major energy dissipation is through graphene edge folding; as the tension increases, dislocations start to develop in the sample to gradually dominate the energy dissipation; finally, at large enough tension, graphene layers become decoupled and start to slide and cause friction, which induces the more severe energy dissipation. The generation and modulation of dislocations are modeled by molecular dynamics calculation and a method to count the energy loss is proposed and compared to the experiment.

[1]  S. More,et al.  Strain engineering of graphene nano-resonator , 2021 .

[2]  Zhanjun Wu,et al.  Molecular dynamics simulation on the formation and development of interlayer dislocations in bilayer graphene , 2019, Nanotechnology.

[3]  N. J. Engelsen,et al.  Elastic strain engineering for ultralow mechanical dissipation , 2018, Science.

[4]  P. Steeneken,et al.  On-chip Heaters for Tension Tuning of Graphene Nanodrums , 2018, Nano letters.

[5]  Fan Ye,et al.  Electrothermally Tunable Graphene Resonators Operating at Very High Temperature up to 1200 K. , 2018, Nano letters.

[6]  C. Stampfer,et al.  Tailoring Mechanically Tunable Strain Fields in Graphene. , 2017, Nano letters.

[7]  Joel Moser,et al.  Energy-dependent path of dissipation in nanomechanical resonators. , 2017, Nature nanotechnology.

[8]  B. Gurrutxaga-Lerma.  How strong is the temperature increase due to a moving dislocation , 2017 .

[9]  V. Shenoy,et al.  Limits of Coherency and Strain Transfer in Flexible 2D van der Waals Heterostructures: Formation of Strain Solitons and Interlayer Debonding , 2016, Scientific Reports.

[10]  A. Kis,et al.  Electromechanical oscillations in bilayer graphene , 2015, Nature Communications.

[11]  W. J. Venstra,et al.  Strain-dependent damping in nanomechanical resonators from thin MoS2 crystals , 2015, 1509.03080.

[12]  D. Averin,et al.  Tuning strain in flexible graphene nanoelectromechanical resonators , 2015, 1506.01643.

[13]  Hiroki Hibino,et al.  Energy dissipation in edged and edgeless graphene mechanical resonators , 2014 .

[14]  Han Yan,et al.  Electrostatic pull-in instability in MEMS/NEMS: A review , 2014 .

[15]  H. B. Weber,et al.  Dislocations in bilayer graphene , 2013, Nature.

[16]  C. N. Lau,et al.  Transport in Suspended Monolayer and Bilayer Graphene Under Strain: A New Platform for Material Studies , 2013, 1308.1182.

[17]  Pinshane Y. Huang,et al.  Strain solitons and topological defects in bilayer graphene , 2013, Proceedings of the National Academy of Sciences.

[18]  Shin'ichi Warisawa,et al.  High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain , 2012 .

[19]  Quanshui Zheng,et al.  Observation of microscale superlubricity in graphite. , 2012, Physical review letters.

[20]  A. Croy,et al.  Nonlinear Damping in Graphene Resonators , 2012, 1204.0911.

[21]  Pinshane Y. Huang,et al.  Twinning and twisting of tri- and bilayer graphene. , 2012, Nano letters.

[22]  Jin-Wu Jiang,et al.  Why edge effects are important on the intrinsic loss mechanisms of graphene nanoresonators , 2011, 1111.4535.

[23]  M. Younis.  MEMS Linear and Nonlinear Statics and Dynamics , 2011 .

[24]  Horacio D Espinosa,et al.  Effect of growth orientation and diameter on the elasticity of GaN nanowires. A combined in situ TEM and atomistic modeling investigation. , 2011, Nano letters.

[25]  Thomas Faust,et al.  Damping of nanomechanical resonators. , 2010, Physical review letters.

[26]  P. Kim,et al.  Performance of monolayer graphene nanomechanical resonators with electrical readout. , 2009, Nature nanotechnology.

[27]  Harold S. Park,et al.  The importance of edge effects on the intrinsic loss mechanisms of graphene nanoresonators. , 2009, Nano letters.

[28]  Mark A. Locascio,et al.  Measurements of near-ultimate strength for multiwalled carbon nanotubes and irradiation-induced crosslinking improvements. , 2008, Nature nanotechnology.

[29]  H. Craighead,et al.  Macroscopic tuning of nanomechanics: substrate bending for reversible control of frequency and quality factor of nanostring resonators. , 2007, Nano letters.

[30]  Scott S. Verbridge,et al.  Electromechanical Resonators from Graphene Sheets , 2007, Science.

[31]  E. Schröder,et al.  Application of van der Waals density functional to an extended system: adsorption of benzene and naphthalene on graphite. , 2006, Physical review letters.

[32]  Horacio D Espinosa,et al.  An electromechanical material testing system for in situ electron microscopy and applications. , 2005, Proceedings of the National Academy of Sciences of the United States of America.

[33]  J. Frenken,et al.  Superlubricity of graphite. , 2004, Physical review letters.

[34]  F. Ayazi,et al.  An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations , 2003 .

[35]  Zettl,et al.  Low-friction nanoscale linear bearing realized from multiwall carbon nanotubes , 2000, Science.

[36]  S. Stuart,et al.  A reactive potential for hydrocarbons with intermolecular interactions , 2000 .

[37]  C. S. Coffey,et al.  Plastic deformation, energy dissipation, and initiation of crystalline explosives , 1999 .

[38]  M. Roukes,et al.  Thermoelastic damping in micro- and nanomechanical systems , 1999, cond-mat/9909271.

[39]  Steve Plimpton,et al.  Fast parallel algorithms for short-range molecular dynamics , 1993 .

[40]  Q. Zheng,et al.  Eliminating graphene wrinkles by strain engineering , 2021 .

[41]  S. Amelinckx,et al.  DISLOCATION PATTERNS IN GRAPHITE , 1962 .