A Programmable 0.18-$\mu\hbox{m}$ CMOS Electrochemical Sensor Microarray for Biomolecular Detection

A configurable electrochemical sensor microarray system-on-a-chip fabricated in a standard digital 0.18-mum complementary metal-oxide-semiconductor (CMOS) process is presented. Each pixel within this 5times10 array occupies a 160 mumtimes120 mum area and contains a differential electrochemical transducer with a programmable sensor. The sensor has a digitally configurable topology capable of performing different electroanalytical measurements for a variety of affinity-based biomolecular sensing applications. The main modes of operation for this system are impedance spectroscopy, voltammetry, potentiometry, and field-effect sensing

[1]  Allen J. Bard,et al.  Electrochemical Methods: Fundamentals and Applications , 1980 .

[2]  J. Lakowicz Principles of fluorescence spectroscopy , 1983 .

[3]  Marvin H. White,et al.  A CMOS-integrated 'ISFET-operational amplifier' chemical sensor employing differential sensing , 1989 .

[4]  Barbara Lom,et al.  A versatile technique for patterning biomolecules onto glass coverslips , 1993, Journal of Neuroscience Methods.

[5]  M. Belleville,et al.  Biochips on CMOS: an active matrix address array for DNA analysis , 1999 .

[6]  A. Errachid,et al.  ION-SENSITIVE FIELD-EFFECT TRANSISTORS FABRICATED IN A COMMERCIAL CMOS TECHNOLOGY , 1999 .

[7]  E. Klumperink,et al.  Reducing MOSFET 1/f noise and power consumption by switched biasing , 1999, IEEE Journal of Solid-State Circuits.

[8]  Kinam Park,et al.  Surface modification using silanated poly(ethylene glycol)s. , 2000, Biomaterials.

[9]  F. Van Steenkiste,et al.  A CMOS multi-parameter biochemical microsensor with temperature control and signal interfacing , 2001, 2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177).

[10]  M. Heller,et al.  Electric manipulation of bioparticles and macromolecules on microfabricated electrodes. , 2001, Analytical chemistry.

[11]  P. Sorger,et al.  Electronic detection of DNA by its intrinsic molecular charge , 2002, Proceedings of the National Academy of Sciences of the United States of America.

[12]  D. Schmitt-Landsiedel,et al.  A 128 /spl times/ 128 CMOS bio-sensor array for extracellular recording of neural activity , 2003, 2003 IEEE International Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC..

[13]  Marc Madou,et al.  Scaling issues in chemical and biological sensors , 2003, Proc. IEEE.

[14]  Mansun Chan,et al.  A high density conduction based micro-DNA-identification array fabricated in a CMOS compatible process , 2003, 2003 IEEE International Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC..

[15]  Doris Schmitt-Landsiedel,et al.  Design of an integrated potentiostat circuit for CMOS bio sensor chips , 2003, Proceedings of the 2003 International Symposium on Circuits and Systems, 2003. ISCAS '03..

[16]  G. Gibson,et al.  Microarray Analysis , 2020, Definitions.

[17]  B. Eversmann,et al.  A 128 × 128 CMOS bio-sensor array for extracellular recording of neural activity , 2003 .

[18]  M. D. Rooij,et al.  Electrochemical Methods: Fundamentals and Applications , 2003 .

[19]  Cagri A. Savran,et al.  Microfabricated mechanical biosensor with inherently differential readout , 2003 .

[20]  M. Chan,et al.  A high-density conduction-based micro-DNA identification array fabricated with a CMOS compatible process , 2003 .

[21]  N. Manaresi,et al.  A CMOS chip for individual cell manipulation and detection , 2003, 2003 IEEE International Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC..

[22]  Khaled N. Salama,et al.  Detection System-on-Chip , 2004 .

[23]  J.S. Harris,et al.  Integrated semiconductor vertical-cavity surface-emitting lasers and PIN photodetectors for biomedical fluorescence sensing , 2004, IEEE Journal of Quantum Electronics.

[24]  R. Thewes,et al.  A fully electronic DNA sensor with 128 positions and in-pixel A/D conversion , 2004, IEEE Journal of Solid-State Circuits.

[25]  R. Dutton,et al.  Comprehensive study of noise processes in electrode electrolyte interfaces , 2004 .

[26]  R. Guerrieri,et al.  Capacitive sensor array for localization of bioparticles in CMOS lab-on-a-chip , 2004, 2004 IEEE International Solid-State Circuits Conference (IEEE Cat. No.04CH37519).

[27]  David R. S. Cumming,et al.  The development of scalable sensor arrays using standard CMOS technology , 2004 .

[28]  R. Dutton,et al.  Biological shot-noise and quantum-limited signal-to-noise ratio in affinity-based biosensors , 2005 .