Efforts toward ideal microelectromechanical switches

Since a microelectromechanical (MEM) switch with an electrostatically actuated cantilever was first demonstrated by Petersen in 1978 [1], MEM switches have actively been researched by many research groups. However, comparing with the conventional metal-oxide-semiconductor field-effect transistor (MOSFET), MEM switches are still suffering from their high actuation voltage and insufficient operational reliability, which still remain as a difficult challenge to many MEMS researchers and hinder commercialization of the MEM switches. In this work, we look at what lies behind these difficulties in MEM switches and illustrate bright ideas that have been sought to enhance the actuation voltage and switch endurance (lifetime) problems.

[1]  Jun‐Bo Yoon,et al.  Highly reliable MEMS relay with two-step spring system and heat sink insulator for power applications , 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

[2]  Jun‐Bo Yoon,et al.  Complementary Dual-Contact Switch Using Soft and Hard Contact Materials for Achieving Low Contact Resistance and High Reliability Simultaneously , 2013, Journal of Microelectromechanical Systems.

[3]  Hyun-Ho Yang,et al.  Electrostatic micro-actuator with a pre-charged series capacitor: modeling, design, and demonstration , 2014 .

[4]  Songcheol Hong,et al.  A low voltage actuated micromachined microwave switch using torsion springs and leverage , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[5]  Min-Wu Kim,et al.  An Electrostatically Actuated Stacked-Electrode MEMS Relay With a Levering and Torsional Spring for Power Applications , 2012, Journal of Microelectromechanical Systems.

[6]  Douglas Newton.  What is Design and Technology , 2005 .

[7]  Jun‐Bo Yoon,et al.  Carbon nanotubes network contact lubrication for highly reliable MEMS switch , 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

[8]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[9]  K. Petersen.  Dynamic micromechanics on silicon: Techniques and devices , 1978, IEEE Transactions on Electron Devices.

[10]  D. Peyrou,et al.  Impact of the Surface Roughness Description on the Electrical Contact Resistance of Ohmic Switches Under Low Actuation Forces , 2012, IEEE Transactions on Components, Packaging and Manufacturing Technology.

[11]  Min-Wu Kim,et al.  A Complementary Dual-Contact MEMS Switch Using a “Zipping” Technique , 2014, Journal of Microelectromechanical Systems.

[12]  Jun-Bo Yoon,et al.  A Highly Reliable MEMS Relay With Two-Step Spring System and Heat Sink Insulator for High-Power Switching Applications , 2016, Journal of Microelectromechanical Systems.

[13]  Gabriel M. Rebeiz,et al.  Variable spring constant, high contact force RF MEMS switch , 2010, 2010 IEEE MTT-S International Microwave Symposium.

[14]  Tsu-Jae King Liu,et al.  4-terminal relay technology for complementary logic , 2009, 2009 IEEE International Electron Devices Meeting (IEDM).

[15]  Hyun-Ho Yang,et al.  An ultra-low voltage MEMS switch using stiction-recovery actuation , 2013 .

[16]  Min-Wu Kim,et al.  Ultra-low voltage MEMS switch using a folded hinge structure , 2014 .

[17]  Jun‐Bo Yoon,et al.  A Highly Reliable Two-Axis MEMS Relay Demonstrating a Novel Contact Refresh Method , 2015, Journal of Microelectromechanical Systems.

[18]  Jun‐Bo Yoon,et al.  An Extremely Low Contact-Resistance MEMS Relay Using Meshed Drain Structure and Soft Insulating Layer , 2011, Journal of Microelectromechanical Systems.