Compliant joints for the improvement of the dynamic behaviour of a gantry stage with direct drives

Gantry stages, which consist of two parallel acting servo drives, are commonly used in machine tools. One drawback of this concept is the crosstalk between both drives due to the structural coupling that can cause stability issues and therefore limits the bandwidth of the position control. This paper deals with the development of compliant joints to solve the coupling between the drives. When compared to solutions containing bearings, the advantages of such flexible elements are low friction and the absence of backlash. To adjust the properties of the joints, packages of spring-steel-sheets are used as compliant links. One design aspect of the flexible joints is a low stiffness relating to the rotation around one specific axis, but a high stiffness relating to the other degrees of freedom. With this method, the dynamic behaviour of the gantry stage is modified and the bandwidth of the controllers can be increased. Additionally, by releasing the mechanical coupling of the drives, the reaction forces the actuators have to provide can be reduced. Both systems with flexible and with rigid connecting elements, are analysed by measured frequency response functions.

[1]  Placid Mathew Ferreira,et al.  Design analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage , 2007 .

[2]  B. Shirinzadeh,et al.  Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation , 2010 .

[3]  Steffen Ihlenfeldt,et al.  MODAL-SPACE CONTROL OF A LINEAR MOTOR-DRIVEN GANTRY SYSTEM , 2019 .

[4]  Nicolae Lobontiu,et al.  Corner-Filleted Flexure Hinges , 2001 .

[5]  Gary M. Bone,et al.  Design and control of a dual-stage feed drive , 2005 .

[6]  I. Postlethwaite,et al.  The generalized Nyquist stability criterion and multivariable root loci , 1977 .

[7]  D. Gweon,et al.  Development of flexure based 6-degrees of freedom parallel nano-positioning system with large displacement. , 2012, The Review of scientific instruments.

[8]  Qingsong Xu,et al.  A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation , 2011, IEEE Transactions on Automation Science and Engineering.

[9]  Harvey Lipkin,et al.  Design and Analysis of Remote Center of Compliance Structures , 2003, J. Field Robotics.

[10]  R L Hibbard,et al.  A flexure-based tool holder for sub-μm positioning of a single point cutting tool on a four-axis lathe , 2005 .

[11]  Larry L. Howell,et al.  Handbook of compliant mechanisms , 2013 .

[12]  Eiji Shamoto,et al.  Design and application of a sliding mode controller for accurate motion synchronization of dual servo systems , 2013 .

[13]  U. Sonmez Compliant MEMS Crash Sensor Designs: The Preliminary Simulation Results , 2007, 2007 IEEE Intelligent Vehicles Symposium.

[14]  Steffen Ihlenfeldt,et al.  Flexible coupling of drive and guide elements for parallel-driven feed axes to increase dynamics and accuracy of motion , 2017 .

[15]  D. Gweon,et al.  Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors , 2005 .

[16]  Tian Jian Lu,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering Mems Actuators and Sensors: Observations on Their Performance and Selection for Purpose , 2022 .

[17]  Steffen Ihlenfeldt,et al.  Kinematically Coupled Force Compensation—Experimental Results and Advanced Design for the 1D-Implementation , 2019 .

[18]  T S Giam,et al.  Precision coordinated control of multi-axis gantry stages. , 2007, ISA transactions.

[19]  G. K. Ananthasuresh,et al.  Micro-scale composite compliant mechanisms for evaluating the bulk stiffness of MCF-7 cells , 2015 .

[20]  Jonathan B. Hopkins,et al.  Corrigendum to Synthesis of multi-degree of freedom, parallel flexure system concepts via Freedom and Constraint Topology (FACT)—Part I: Principles , 2010 .