论文信息 - Fish and chips: single chip silicon MEMS CTDL salinity, temperature, pressure and light sensor for use in fisheries research

Fish and chips: single chip silicon MEMS CTDL salinity, temperature, pressure and light sensor for use in fisheries research

A single-chip silicon MEMS CTDL multi sensor for use in aqueous environments is presented. The new sensor chip consists of a conductivity sensor based on platinum electrodes (C), an ion-implanted thermistor temperature sensor (T), a piezoresistive pressure sensor (D for depth/pressure) and an ion-implanted p-n junction light sensor (L). The design and fabrication process is described. A temperature sensitivity of 0.8 /spl times/ 10/sup -3/K/sup -1/ has been measured and detailed analysis of conductivity measurement data shows a cell constant of 81 cm/sup -1/.

A. Hyldgard | E.V. Thomsen | O. Hansen

[1] M. I. Montenegro,et al. Microelectrodes : theory and applications , 1991 .

[2] Erik Vilain Thomsen,et al. Highly reliable O-ring packaging concept for MEMS pressure sensors , 2004 .

[3] Julian D. Metcalfe,et al. Geolocation of free-ranging fish on the European continental shelf as determined from environmental variables , 2003 .

[4] E. Lewis,et al. The practical salinity scale 1978 and its antecedents , 1980 .