Low actuation voltage ground plane membranes for a frequency agile microstrip patch antenna

A frequency agile microstrip patch antenna is presented. A micromachined membrane is used as the ground plane below the antenna patch. Actuation of this membrane away from the patch introduces an air gap between the substrate and the ground plane. Control of the air gap thickness, enables control of the antenna's resonant frequency. Thereby, enabling this narrowband antenna to operate over a wide frequency band. Ensemble simulations and experimental results are presented. Measurements showed control of antenna resonant frequency from 16.8GHz to 17.82GHz (approximately 6% variation) for the ground plane membrane deflecting from 0μm to 138μm.

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