论文信息 - Aspherical surface measurement using quadri-wave lateral shearing interferometry

Aspherical surface measurement using quadri-wave lateral shearing interferometry

Aspherical surfaces are characterized in reflection using a quadri-wave lateral shearing interferometer (QWLSI). This measures the deformation of a reference source due to the reflection on an aspherical shape. Thanks to the wave front sensor high dynamic range, aspherical sags as large as 100 μm are achieved.

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