论文信息 - Evaluation of a PECVD advanced barrier (k=3.7) for 32nm CMOS technology and below - 字舞流文

Evaluation of a PECVD advanced barrier (k=3.7) for 32nm CMOS technology and below

E. Petitprez | A. Farcy | P. Brun | J. Torres | L. Chapelon

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