论文信息 - Plasma enhanced atomic layer etching of high-k layers on WS2 - 字舞流文

Plasma enhanced atomic layer etching of high-k layers on WS2

S. De Gendt | J. de Marneffe | A. Goodyear | M. Cooke | I. Asselberghs | S. Kundu | D. Marinov | Pieter-Jan Wyndaele | N. St. J. Braithwaite