论文信息 - On the calibration of surface plates

On the calibration of surface plates

Abstract Calibration of large surface plates could be performed using different measuring systems. In this investigation an autocollimator system, a laser system and a coordinate measuring machine have been investigated. A comparison among these methods of calibration has been carried out. An Elcomat 3000 autocollimator of resolution 0.05 arcsecond, an Agilent 5529A laser interferometer system of resolution 0.05 arcsecond and a Prismo/Zeiss Computerized Numerically Controlled Coordinate Measuring Machine (CNC–CMM) respectively are used. Large reflecting mirror, angular retro reflector and sensitive probe are used with autocollimator, laser systems and CNC–CMM respectively to identify heights at each position on the tested surface plate. Repeated results from the different methods are carried out and presented in the paper. Uncertainties associated with the measurement results of each method have been estimated using the GUM procedures and given in the paper. The paper discusses the difficults and ease as well as accuracies associated with each method.

[1] S. Standard. GUIDE TO THE EXPRESSION OF UNCERTAINTY IN MEASUREMENT , 2006 .

[2] Robert Hooke,et al. Uncertainty, Calibration and Probability. , 1974 .

[3] W. Moore,et al. Foundations of mechanical accuracy , 1970 .

[4] H Han Haitjema,et al. Evaluation of surface plate flatness measurements , 1993 .

[5] Joseph Drescher. Analytical estimation of measurement uncertainty in surface plate calibration by the Moody method using differential levels , 2003 .