Flexible Thin-Film PZT Ultrasonic Transducers

We recently reported a transfer process that provides large area PZT $(\mathrm{Pb}(\mathrm{Zr}_{0.52},\mathrm{i}_{0.48})_{0.98}\mathrm{O}_{3})$ thin films released from a high temperature growth substrate to few micron thick flexible polyimide substrates [1]. The released films have superior piezoelectric properties compared to as-grown films due to declamping from the rigid substrate. In this work, we demonstrate ultrasonic transducers fabricated using released PZT films.