A Process For Monolithic Fabrication Of Microlenses On Integrated Circuits

A microlens fabrication process is described which is based on commercially available IC processing materials. The lenses are formed on top of circular pedestals by melting a photoresist developed in a suitable pattern. Due to surface tension forces melting leads to formation of a spherical surface which is pinned by the sharp edge of the pedestal. The process gives microlenses of excellent quality which show diffraction limited resolution.