An on-line data collection and analysis system for VLSI devices at wafer probe and final test
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This paper describes a flexible software system for the collection of parametric, functional pattern fail, and bitmap data on-line during production testing of VLSI devices. The data is automatically loaded into a relational database for subsequent analysis by process and yield improvement software. The user can control the type and amount of data that is collected at each stage of a product's life. By enabling data collection on every test, the same system can be used for engineering and debug analysis.
[1] Chi W. Yau,et al. Trouble-shooting: a key to process improvement , 1988, International Test Conference 1988 Proceeding@m_New Frontiers in Testing.
[2] Jim Mosley. A flexible approach to data collection for component test systems , 1993, Proceedings of IEEE International Test Conference - (ITC).
[3] Wojciech Maly,et al. Process monitoring oriented IC testing , 1989, Proceedings. 'Meeting the Tests of Time'., International Test Conference.