Linear Deconvolution Processing on Resolution Enhancement for Scatterometer

Respecting the low measurement resolution of scatterometer, the adaption of the linear deconvolution processing for scatterometer is investigated to improve its spatial resolution. Based on the linear deconvolution processing, a specific form of averaging window of the resolution enhanced solution is derived. A quantitative evaluation of resolution enhancement and noise amplification of the reconstruction is conducted. The results show that some specific resolution and noise amplification solution can be obtained by tradeoff parameter selection. Based on the linear deconvolution processing, the resolution enhancement of scatterometer data can be analyzed quantitatively.