Polarized monolithic white semipolar (20–21) InGaN light-emitting diodes grown on high quality (20–21) GaN/sapphire templates and its application to visible light communication

Abstract We demonstrate efficient, polarized and monolithic white semipolar (20–21) InGaN light-emitting diodes (LEDs) grown on high crystal quality 4-inch (20–21) GaN/sapphire template. Materials growth by metal-organic chemical vapor deposition (MOCVD) and characterization by atom probe tomography (APT) were carried out. The fabricated regular 0.1 mm2 size LEDs show a high electrical performance with an output power of 3.9 mW at 100 mA, an emission spectrum with two peaks located at 445 nm and 565 nm, a CIE point of (0.37, 0.42) and a polarization ratio of 0.30, which make them promising candidates for backlighting in liquid crystal displays (LCDs) application. Moreover, the fabricated square phosphor-free white μLED with size ranging from 20 to 60 μm, exhibit a high 3 dB modulation bandwidth of 660 MHz in the visible light communication (VLC) system, which benefits from the shorter carrier lifetime grown on the semipolar (20–21) plane. To our best knowledge, this is the first demonstration of monolithic white semipolar μLEDs in the VLC application, which can overcome the limitation of the slow frequency response of yellow phosphors converted commercial white LEDs. These results demonstrate the huge potentials to produce high efficiency monolithic white semipolar InGaN LEDs on cost-effective large area sapphire substrates.

[1]  M. Teisseire,et al.  Defect reduction method in (11-22) semipolar GaN grown on patterned sapphire substrate by MOCVD: Toward heteroepitaxial semipolar GaN free of basal stacking faults , 2014 .

[2]  S. Denbaars,et al.  Using tunnel junctions to grow monolithically integrated optically pumped semipolar III-nitride yellow quantum wells on top of electrically injected blue quantum wells. , 2017, Optics express.

[3]  H. Masui,et al.  Nonpolar and Semipolar III-Nitride Light-Emitting Diodes: Achievements and Challenges , 2010, IEEE Transactions on Electron Devices.

[4]  P. Vennégués,et al.  Study of defect management in the growth of semipolar (11-22) GaN on patterned sapphire , 2015 .

[5]  Moon J. Kim,et al.  Indium segregation in N-polar InGaN quantum wells evidenced by energy dispersive X-ray spectroscopy and atom probe tomography , 2017 .

[6]  S. Denbaars,et al.  High-Efficiency Single-Quantum-Well Green and Yellow-Green Light-Emitting Diodes on Semipolar (2021) GaN Substrates , 2010 .

[7]  J. Bai,et al.  Monolithically integrated white light LEDs on (11–22) semi-polar GaN templates , 2019, Scientific Reports.

[8]  Shinichi Tanaka,et al.  High optical polarization ratio from semipolar (202¯1¯) blue-green InGaN/GaN light-emitting diodes , 2011 .

[9]  Jong Kyu Kim,et al.  Solid-State Light Sources Getting Smart , 2005, Science.

[10]  Shuji Nakamura,et al.  The Roles of Structural Imperfections in InGaN-Based Blue Light-Emitting Diodes and Laser Diodes , 1998 .

[11]  J. Cha,et al.  Semipolar (202̅1̅) GaN and InGaN Light-Emitting Diodes Grown on Sapphire. , 2017, ACS applied materials & interfaces.

[12]  P. Bagot,et al.  Indium clustering in a-plane InGaN quantum wells as evidenced by atom probe tomography , 2015 .

[13]  S. Denbaars,et al.  Semipolar GaN templates on sapphire: 432 nm InGaN light-emitting diodes and light extraction simulations , 2018 .

[14]  Shuji Nakamura,et al.  Electroluminescence Characterization of (2021) InGaN/GaN Light Emitting Diodes with Various Wavelengths , 2010 .

[15]  Matthias Peter,et al.  Optically pumped GaInN/GaN multiple quantum wells for the realization of efficient green light-emitting devices , 2013 .

[16]  Shuji Nakamura,et al.  Efficient Semipolar (11-22) 550 nm Yellow/Green InGaN Light-Emitting Diodes on Low Defect Density (11-22) GaN/Sapphire Templates. , 2017, ACS applied materials & interfaces.

[17]  Rong Zhang,et al.  High-Brightness Polarized Green InGaN/GaN Light-Emitting Diode Structure with Al-Coated p-GaN Grating , 2016 .

[18]  P. Vennégués,et al.  Growth of semipolar (202̄1) GaN layers on patterned silicon (114) 1° off by Metal Organic Vapor Phase Epitaxy , 2015 .

[19]  S. Denbaars,et al.  Demonstration of phosphor-free polarized white light emission from monolithically integrated semipolar InGaN quantum wells , 2015 .

[20]  Morteza Monavarian,et al.  Trade-off between bandwidth and efficiency in semipolar (202¯1¯) InGaN/GaN single- and multiple-quantum-well light-emitting diodes , 2018 .

[21]  T. Mukai,et al.  White light emitting diodes with super-high luminous efficacy , 2010 .

[22]  Guohong Wang,et al.  Quantum Efficiency Enhancement of 530 nm InGaN Green Light-Emitting Diodes with Shallow Quantum Well , 2013 .

[23]  R. Dupuis,et al.  Control of Quantum-Confined Stark Effect in InGaN-Based Quantum Wells , 2009, IEEE Journal of Selected Topics in Quantum Electronics.

[24]  S. Denbaars,et al.  Sustained high external quantum efficiency in ultrasmall blue III–nitride micro-LEDs , 2017 .

[25]  Ryan T. Ley,et al.  High efficiency of III-nitride micro-light-emitting diodes by sidewall passivation using atomic layer deposition. , 2018, Optics express.

[26]  D. Feezell,et al.  Nonpolar ${m}$ -Plane InGaN/GaN Micro-Scale Light-Emitting Diode With 1.5 GHz Modulation Bandwidth , 2018, IEEE Electron Device Letters.

[27]  M. S. Islim,et al.  Towards 10 Gb/s orthogonal frequency division multiplexing-based visible light communication using a GaN violet micro-LED , 2017 .

[28]  K. Ikeda,et al.  Design parameters of frequency response of GaAs—(Ga,Al)As double heterostructure LED's for optical communications , 1977, IEEE Transactions on Electron Devices.

[29]  Morteza Monavarian,et al.  Impact of crystal orientation on the modulation bandwidth of InGaN/GaN light-emitting diodes , 2018 .

[30]  E Fred Schubert,et al.  Linearly polarized emission from GaInN lightemitting diodes with polarization-enhancing reflector. , 2007, Optics express.

[31]  Kanglin Xiong,et al.  Semipolar (20 2¯1) GaN and InGaN quantum wells on sapphire substrates , 2014 .

[32]  D. O’brien,et al.  100-Mb/s NRZ Visible Light Communications Using a Postequalized White LED , 2009, IEEE Photonics Technology Letters.

[33]  S. Denbaars,et al.  444 nm InGaN light emitting diodes on low-defect-density GaN templates on patterned sapphire , 2017 .