Arrays of Arbitrarily Shaped Nanoparticles: Overlay‐Errorless Direct Ion Write

A simple solution to lithographically write down to 20–30 nm features over micrometer-sized nanoparticle arrays with high fidelity of pattern transfer from the designed to fabricated architectures is shown. It is achieved via a two-step approach: (i) fabrication of basic shape nanoparticles by electron beam lithography, gold deposition via sputtering and lift-off, then (ii) nano-patterning by focused ion beam lithography. Application potential of 3D tailored nanoparticles for nanotweezers is discussed on the basis of numerical modeling and experimental measurements of extinction.

[1]  H. Misawa,et al.  Nanoparticle plasmon-assisted two-photon polymerization induced by incoherent excitation source. , 2008, Journal of the American Chemical Society.

[2]  D. Gramotnev,et al.  Thermal tweezers for nano-manipulation and trapping of interacting atoms or nanoparticles on crystalline surfaces. , 2012, The Journal of chemical physics.

[3]  Saulius Juodkazis,et al.  Spectral sensitivity of uniform arrays of gold nanorods to dielectric environment , 2007 .

[4]  D. Gramotnev,et al.  Plasmonics beyond the diffraction limit , 2010 .

[5]  Saulius Juodkazis,et al.  3D-tailored gold nanoparticles for light field enhancement and harvesting over visible-IR spectral range , 2011 .

[6]  A. Tseng,et al.  Recent developments in nanofabrication using ion projection lithography. , 2005, Small.

[7]  Keiji Sasaki,et al.  Spectrally-resolved atomic-scale length variations of gold nanorods. , 2006, Journal of the American Chemical Society.

[8]  Ampere A Tseng,et al.  Recent developments in nanofabrication using focused ion beams. , 2005, Small.

[9]  G. Si,et al.  Greatly enhanced continuous-wave terahertz emission by nano-electrodes in a photoconductive photomixer , 2012 .

[10]  S. Wada,et al.  Coupled laser molecular trapping, cluster assembly, and deposition fed by laser-induced Marangoni convection. , 2008, Optics express.

[11]  Zhenguo Yang,et al.  Oriented nanostructures for energy conversion and storage. , 2008, ChemSusChem.

[12]  Samuel M. Nicaise,et al.  Neon Ion Beam Lithography (NIBL). , 2011, Nano letters.

[13]  M. Lipson,et al.  Optical manipulation of nanoparticles and biomolecules in sub-wavelength slot waveguides , 2009, Nature.

[14]  Saulius Juodkazis,et al.  SERS substrate for detection of explosives. , 2012, Nanoscale.

[15]  Mauro Prasciolu,et al.  Focused ion beam lithography for two dimensional array structures for photonic applications , 2005 .

[16]  Saulius Juodkazis,et al.  Development of Interdigitated Array Electrodes with Surface-enhanced Raman Scattering Functionality , 2010, Analytical Sciences.

[17]  F. Angelis,et al.  Silver-based surface enhanced Raman scattering (SERS) substrate fabrication using nanolithography and site selective electroless deposition , 2009 .

[18]  Tatsuya Shoji,et al.  Metallic-Nanostructure-Enhanced Optical Trapping of Flexible Polymer Chains in Aqueous Solution As Revealed by Confocal Fluorescence Microspectroscopy , 2012 .

[19]  Saulius Juodkazis,et al.  Nanoparticle-enhanced photopolymerization , 2009 .

[20]  Martin L. Kurth,et al.  Gap surface plasmon waveguides with enhanced integration and functionality. , 2012, Nano letters.

[21]  Romain Quidant,et al.  Plasmon nano-optical tweezers , 2011 .

[22]  Saulius Juodkazis,et al.  Feature-size reduction of photopolymerized structures by femtosecond optical curing of SU-8 , 2006 .

[23]  Keiji Sasaki,et al.  Clusters of Closely Spaced Gold Nanoparticles as a Source of Two‐Photon Photoluminescence at Visible Wavelengths , 2008 .