Trace Moisture Analysis in Specialty Gases

Even though we have been successful in reducing impurities, particularly moisture in bulk gases such as N 2 , Ar, and H 2 to below the 1 ppb level for semiconductor industry, the same performance has not been achieved in specialty gas delivery systems. This is due to the fact that these specialty gases are very active and corrosive, and they contain trace impurities including moisture. These gases react readily with gas delivery system surfaces and deteriorate the process equipment and performance